155 technical terms and definitions
low power chip design, dvfs controller, power management ic, pmic frequency scaling
Dynamic Voltage and Frequency Scaling (DVFS) is the critical active power management technique in modern SoCs and microprocessors that dynamically adjusts the operating voltage…
plasma etching, RIE, reactive ion etching, ICP etching, plasma physics and etching
Dry etching is the Coburn–Winters synergy: ion bombardment perpendicular to the wafer surface enhances the chemical etch rate of silicon in XeF from 1 nm/min to 55 nm/min — a 9.2…
non contact exposure, projection lithography 1973
Define the Mask-to-Wafer Working Gap Removing physical contact meant introducing a deliberate working gap between the mask and the wafer, with an optical system filling that gap…
perkin elmer micralign, projection lithography 1973
Detail 1:1 Imaging and the Scanning Slit Micralign projected the mask pattern onto the wafer at 1:1 scale, meaning the image on the wafer was the same size as the pattern on…
catadioptric optics, projection lithography 1973
Describe Micralign Model Generations and Refinements Perkin-Elmer did not stop at the original 1973 Micralign design, and refined successive models with improvements…