702 technical terms and definitions
lithography yield, projection lithography 1973
Explain Why Reduction Steppers Eventually Succeeded Micralign Micralign's 1:1 scanning projection design solved the contact-defect problem, but as device features kept shrinking…
optical emission spectroscopy etch, endpoint algorithm semiconductor, etch stop detection, plasma etch process control, real time etch monitoring
Endpoint algorithms are the real-time detection systems that tell a plasma etch tool exactly when to stop etching, and getting that timing right is just as critical as every other…