partial least squares

PLS (Partial Least Squares Regression) is a multivariate regression technique that finds latent variables (components) in the predictor space that are maximally correlated with the response variables — superior to PCA regression when the goal is prediction rather than variance explanation.

How Does PLS Work?

  • Latent Variables: Find directions in $X$ space that explain maximum covariance with $Y$ (not just variance in $X$).
  • Decomposition: $X = TP^T + E$, $Y = UQ^T + F$ with maximum correlation between $T$ and $U$.
  • Prediction: New $X$ values are projected onto latent variables to predict $Y$.
  • Variable Importance (VIP): PLS provides Variable Importance in Projection scores for feature ranking.

Why It Matters

  • Few Samples, Many Variables: Works when $p >> n$ (more variables than observations) — common in semiconductor data.
  • Correlated Predictors: Handles multicollinearity that breaks ordinary least squares regression.
  • Virtual Metrology: PLS is a standard algorithm for virtual metrology models in semiconductor fabs.

PLS is regression designed for correlated, high-dimensional data — finding the process variations that actually matter for predicting output quality.

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