AlCu

# AlCu

AlCu is aluminum alloyed with copper for a specified metallization application.

## Connect the name to its role

Document whether this film is a target, mask, liner, electrode or temporary layer at the step being discussed. The same material can have different roles in different modules.

## Integration context

The copper addition is an alloy constituent, not a separate copper wiring level. Alloy composition, microstructure and thermal history influence reliability and removal behavior. Etch residues can differ from those of pure aluminum; the process must be qualified for the actual alloy.

## What to verify

Verify alloy specification, sheet resistance, line integrity and residue after the complete clean sequence.

Before selecting removal conditions, identify all exposed neighboring materials and the amount of loss each can tolerate. Verify the result using the measurements appropriate to the structure, then check that the surface is suitable for the next deposition, contact or clean step.

## Related terminology

AlCu, aluminum copper alloy. Short abbreviations are local process vocabulary and can have other meanings; use the full module name when searching.

## Source and scope

[Aluminum etch and corrosion control](https://www.nanofab.ualberta.ca/avoiding-corrosion-when-dry-etching-aluminum/). The diagram is an original teaching schematic. Layer choices and process families describe an example rather than a universal manufacturing recipe.